Request for Quotation
Also available in 48 h Express-Service
MEMpax® is a new thin glass with the exceptional technical properties of borosilicate glass. The material features a very smooth, high-quality surface and features an excellent flatness. A sophisticated fire polishing process enables the thin glass to have an extremely low micro-roughness of typically less than 0,8 nm. In most cases, the high surface quality and flatness of MEMpax® permit direct use without the necessity of additional mechanical polishing. The thermal coefficient of expansion of MEMpax® is close to silicon, making this material a perfect choice for wafer applications in anodic bonding processes. Further typical uses for the high purity borosilicate-thin glass are MEMS applications (micro-electro-mechanical systems) and biotechnology applications. MEMpax® is a registered trademark of SCHOTT.
To receive a quotation for wafers, windows, or substrates made of MEMpax® materials with specific dimensions, please select a thickness from the table in the specifications or click the button below.
Note: If you plan a sizeable serial production, but none of the listed currently available glass thicknesses in the table match the technical requirements of your application, please contact us. During the introduction stage of MEMpax®, we can ask SCHOTT to melt the glass thickness you need in the future. Of course, this requires an amount of material large enough.
Transmission of MEMpax at 200–1100 nm
UV-Transmission of MEMpax at 200–400 nm
Thickness (mm) |
Tolerance |
![]() |
---|---|---|
0,200 | ±0,012 | ✔ |
0,300 | ±0,012 | ✔ |
0,400 | ±0,015 | ✔ |
0,500 | ±0,018 | ✔ |
The thicknesses marked with "✔" are also available within 48–h Express Service. | ||
If you need a glass with a larger thickness, SCHOTT BOROFLOAT® 33 is an alternative because it has almost the same thermal expansion, refractive index, and density as MEMpax®. BOROFLOAT® 33 is available in an extensive range of thicknesses from 0,7 mm upwards. |
Index of Refraction of MEMpax |
||
---|---|---|
Title
|
Wavelength (nm)
|
Refractive Index
|
ng |
435,8 |
1,4803 |
nF' |
479,9 |
1,4768 |
ne |
546,1 |
1,4732 |
nd |
587,6 |
1,4715 |
nD |
589,3 |
1,4714 |
nC' |
643,8 |
1,4696 |
nC |
656,3 |
1,4693 |
- Hydrolytic Resistance:
- Class HGB 1 (according to ISO 719)
- Acid Resistance:
- Class S 1 (according to DIN 12 116)
- Alkali Resistance:
- Class A 2 (according to ISO 695)
Dielectric Constant (permittivity) εr |
||||||
---|---|---|---|---|---|---|
Frequency in GHz | 0,001 |
1,0 |
2,0 |
5,0 |
24 |
77 |
4,8 |
4,4 |
4,5 |
4,4 |
4,4 |
4,5 |
Loss Tangent tan(δ) x 10-4 |
||||||
---|---|---|---|---|---|---|
Frequency in GHz | 0,001 |
1,0 |
2,0 |
5,0 |
24 |
77 |
37,6 |
58 |
62 |
73 |
130 |
140 |
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