Precision optics picture, Glass wafers
 
Home / Products / Optical Substrates / Borosilicate Glass Wafers

PYREX Wafers & BOROFLOAT Wafers
Glass Wafers made of Borosilicate Glass

Typical Applications

  • Semiconductor applications
  • Micro lithography
  • Substrates for anodic bonding
  • Optical substrates
  • Micro system technology
  • Micro mechanics
  • Microstructure applications
Fig.: Borosilicate glass wafer with flat

PYREX Glass wafer

The picture shows a PYREX wafer
double side polished, with a ground
standard orientation flat.
Fig.: Glass wafers packaged in typical
clean room trays

Clean room compatible glass wafer packaging

If required, our Pyrex or BOROFLOAT
wafers can be manufactured, cleaned,
and packaged according to clean room
specifications (class 1000).

Our high quality borosilicate glass wafers are made of borosilicate glass materials (PYREX® or BOROFLOAT® e.g.) and are optically polished on both surfaces. The excellent flatness and a low warp of our borosilicate wafers and the thermal coefficient of expansion close to the one of silicon, facilitate sophisticated applications in the semiconductor industry such as anodic bonding to silicon and various micro optical applications. On request, our borosilicate glass wafers can be made with a ground SEMI standard flat or a notch. On request, custom specific dimensions or shapes as well as optional clean room compatible packaging is available. We also make customized glass wafers of any other suitable glass material like quartz glass or based on any other suitable glass material. Please use our inquiry form for your custom made glass wafer of borosilicate glass or made of any other glass material.


Typical Specifications of
Borosilicate Glass Wafers*

Refractive Index

  • nd = 1,474 (588nm)

Density

  • 2,23g/cm3

Coefficient of Thermal Expansion (0-300°C)

  • 32,5 x10-7

Dielectric Constant

  • 4,6 (20°C; 1Mhz)

Loss Factor

  • 0,5% (20°C;1Mhz)

Common Dimensions

  • ø100mm or ø4"
    (Flat: 32,5mm +/-1,0)
  • ø125mm or ø5"
    (Flat: 37,5mm +/-1,0)
  • ø150mm or ø6"
    (Flat: 42,5mm +/-1,0)
  • ø200mm or ø8"
    (Flat: 57,5mm +/-1,0)
  • Other dimensions, thicknesses
    and other flats or secondary flats
    on request

TTV (total thickness variation)

Surface Quality

  • typ. 60-40 scratch & dig (MIL-0-13830A)
  • Other on request
All given details and specifications are mean reference values and are not guaranteed. In addition, please consider our "Notes on technical specifications"